Technical Data:技术参数：Shape: Horizontal design.外形：水平设计Chamber dimensions: ? = 1,7 m, Length = 3,5 m.腔体尺寸： ? = 1,7 m, Length = 3,5 m.Vacuum better than: 1x10-5 mbar. 真空度：< 1x10-5 mbar. Temperature range: from –55oC to +120oC.温度范围： –55oC to +120oCHeating/Cooling speed at the shrouds: 1oC/min. 导热层加热冷却速率： 1oC/min. Shroud temperature uniformity: 2oC. 导热层温度均匀性： 2oCWorking surface: optical table.工作台面：光学桌子特殊设计：Table supported on a seismic block, isolated from chamber supports.工作桌面区别于腔体，单独固定在一个防震区块上。4 shroud zones with independent temperature control.四个区域拥有单独的温度控制模块。TCU and vacuum pumps are in separated machinery room.温度控制模块和真空泵在不同的房间