1.设备名称：霍尔效应测试仪2.功能描述：测量半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数3.技术参数：3-1测试范围：Si, SiGe, SiC, GaAs, InGaAs, InP, GaN (N Type & P Type)等材质的半导体薄膜中载流子类型、载流子浓度、迁移率、电阻率、霍尔系数等参数3-2磁场：3-2-1磁场强度：0.5T3-2-2磁场类型：电磁体3-2-3磁场均匀性：磁场不均匀性＜1 %10年内磁场变化＜0.2%3-3温 度：3-3-1温度区域：77K和300K3-4电阻率范围：1 μ Ohm*cm ~10 M Ohm*cm 3-5电阻范围：0.1 m Ohms ~10 G Ohms3-6载流子浓度：107~1021cm-33-7迁移率：10-2~107 cm2/volt*sec3-8输入电流：3-8-1电流范围：1000 pA~10mA3-8-2电流解析度：1 pA (lowest range)3-8-3电流精度：2%3-9输入电压：3-9-1电压范围：10V3-9-2电压分辨率：1μV4.仪器特点：4-1Automatic or manual current selection自动或手动模式(电流控制磁场模式)4-2Automatic contact check自动接触检查(欧姆接触)4-3Routine and enhanced software常规和增强软件4-4Differential resistivity measurements by I/V-curvesI/V曲线测试电阻率差异4-5Electromagnet电磁体4-6Misalignment voltage compensation失调电压补偿4-7Correction of slow sample drift voltage, especially for ZnO,修正慢样品漂移电压，特别是氧化锌4-8Automatic field calibration自动现场标定4-9Large concentration and resistivity range大浓度和电阻率范围4-10Flexible, modular hardware灵活的模块化硬件4-11Support of various magnets, for example BioRad HL 5200支持多样磁场4-12Support of various temperature controllers支持各种温度控制器(支持客户自行升级变温系统)4-13Van der Pauw and bar shape (bridge-type) Hall samples支持范德堡和霍尔巴法测试霍尔5硬件5-1The standard system consists of a bench top electronic system, a small magnet and a sample stage for room temperature and LN2 measurements.标准系统包含电子测试系统、磁场和两个温度区域的测试平台（室温和液氮温度）5-2The electronics include the current source, the voltage measurement part, the contact switching module, the magnet power supply and the IEEE or RS232 interface. It is completely micro processor controlled.电子测试系统包括由单片机控制的电流源、电压测试、接触开关模块、磁场电源、IEEE或RS232接口5-3The contact switching module is designed to allow all possible measurement configurations.接触开关模块支持所有用户用于其他的配置(用户可以采用制冷机做变温霍尔测试)5-4The current source has adjustable limits for voltage and/or power. {+++}电流源具有可调电压和/或电源的限制5-5Voltage measurement provides different input amplifiers optimized for either low current or low voltage applications.电压测量提供了不同的输入放大器或低电流或低电压应用的优化。6软件界面